FRICTION AND WEAR MEASUREMENTS OF SPUTTERED MOSX FILMS AMORPHIZED BY ION-BOMBARDMENT

被引：39

作者：

MIKKELSEN, NJ ^{[1
]}

CHEVALLIER, J ^{[1
]}

SORENSEN, G ^{[1
]}

STRAEDE, CA ^{[1
]}

机构：

[1] JUTLAND INST TECHNOL,DK-8000 AARHUS C,DENMARK

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 14期

关键词：

D O I：

10.1063/1.99666

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1130 / 1132

页数：3

共 11 条

[1] PREPARATION AND PROPERTIES OF DIFFERENT TYPES OF SPUTTERED MOS2 FILMS [J].

BUCK, V .

WEAR, 1987, 114 (03) :263-274

[2] ENHANCEMENT OF SLIDING LIFE OF MOS2 FILMS DEPOSITED BY COMBINING SPUTTERING AND HIGH-ENERGY ION-IMPLANTATION [J].

CHEVALLIER, J ;

OLESEN, S ;

SORENSEN, G ;

GUPTA, B .

APPLIED PHYSICS LETTERS, 1986, 48 (13) :876-877

[3] STOICHIOMETRY AND FRICTION PROPERTIES OF SPUTTERED MOSX LAYERS [J].

DIMIGEN, H ;

HUBSCH, H ;

WILLICH, P ;

REICHELT, K .

THIN SOLID FILMS, 1985, 129 (1-2) :79-91

[4] WEAR-RESISTANCE OF NITROGEN-IMPLANTED STEELS [J].

DIMIGEN, H ;

KOBS, K ;

LEUTENECKER, R ;

RYSSEL, H ;

EICHINGER, P .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :181-190

[5] SLIDING LIFE ENHANCEMENT OF A WS2 SPUTTERED FILM BY ION-BEAM MIXING [J].

HIRANO, M ;

MIYAKE, S .

APPLIED PHYSICS LETTERS, 1985, 47 (07) :683-685

[6] ENHANCED ENDURANCE LIFE OF SPUTTERED MOSX FILMS ON STEEL BY ION-BEAM MIXING [J].

KOBS, K ;

DIMIGEN, H ;

HUBSCH, H ;

TOLLE, HJ ;

LEUTENECKER, R ;

RYSSEL, H .

MATERIALS SCIENCE AND ENGINEERING, 1987, 90 :281-286

[7] IMPROVED TRIBOLOGICAL PROPERTIES OF SPUTTERED MOSX FILMS BY ION-BEAM MIXING [J].

KOBS, K ;

DIMIGEN, H ;

HUBSCH, H ;

TOLLE, HJ ;

LEUTENECKER, R ;

RYSSEL, H .

APPLIED PHYSICS LETTERS, 1986, 49 (09) :496-498

[8]

SPALVINS T, 1969, ASLE TRANS, V12, P36

[9] A REVIEW OF RECENT ADVANCES IN SOLID FILM LUBRICATION [J].

SPALVINS, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (02) :212-219

[10] COATINGS FOR WEAR AND LUBRICATION [J].

SPALVINS, T .

THIN SOLID FILMS, 1978, 53 (03) :285-300

← 1 2 →