SLIDING LIFE ENHANCEMENT OF A WS2 SPUTTERED FILM BY ION-BEAM MIXING

被引：40

作者：

HIRANO, M

MIYAKE, S

机构：

来源：

关键词：

D O I：

10.1063/1.96057

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：683 / 685

页数：3

共 7 条

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[2] HIRANO M, UNPUB T ASME
[3] ION-IMPLANTATION THROUGH ALUMINUM THIN-FILM DEPOSITED ON IRON
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TSAUR, BY
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APPLETON, B
[J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 97 - 105
[5] ION-BEAM-INDUCED REACTIONS IN METAL-SEMICONDUCTOR AND METAL-METAL THIN-FILM STRUCTURES
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TSAUR, BY
LAU, SS
HUNG, LS
[J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 1 - 13
[6] FRICTIONAL AND MORPHOLOGICAL PROPERTIES OF AU-MOS2 FILMS SPUTTERED FROM A COMPACT TARGET
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[J]. THIN SOLID FILMS, 1984, 118 (03) : 375 - 384
[7] TRIBOLOGICAL PROPERTIES OF SPUTTERED MOS2 FILMS IN RELATION TO FILM MORPHOLOGY
SPALVINS, T
[J]. THIN SOLID FILMS, 1980, 73 (02) : 291 - 297