ENHANCED ENDURANCE LIFE OF SPUTTERED MOSX FILMS ON STEEL BY ION-BEAM MIXING

被引：21

作者：

KOBS, K

DIMIGEN, H

HUBSCH, H

TOLLE, HJ

LEUTENECKER, R

RYSSEL, H

机构：

[1] FRAUNHOFER INST FESTKORPERTECHNOL,D-8000 MUNCHEN 60,FED REP GER

[2] FRAUNHOFER ARBEITSGRP INTEGRIERTE SCHALTUNGEN,D-8520 ERLANGEN,FED REP GER

来源：

MATERIALS SCIENCE AND ENGINEERING | 1987年 / 90卷

关键词：

D O I：

10.1016/0025-5416(87)90222-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：281 / 286

页数：6

共 17 条

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[7] WEAR-RESISTANCE OF NITROGEN-IMPLANTED STEELS [J].

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MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :181-190

[8]

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[9] SLIDING LIFE ENHANCEMENT OF A WS2 SPUTTERED FILM BY ION-BEAM MIXING [J].

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[10] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].

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