GAAS LSI-DIRECTED MESFETS WITH SELF-ALIGNED IMPLANTATION FOR N+-LAYER TECHNOLOGY (SAINT)

被引:39
作者
YAMASAKI, K
ASAI, K
KURAMADA, K
机构
关键词
D O I
10.1109/T-ED.1982.21025
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1772 / 1777
页数:6
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