ANNEALING OF TOTAL DOSE DAMAGE - REDISTRIBUTION OF INTERFACE STATE DENSITY ON (100), (110) AND (111) ORIENTATION SILICON

被引:43
作者
STAHLBUSH, RE
LAWRENCE, RK
HUGHES, HL
SAKS, NS
机构
[1] ARACOR,SUNNYVALE,CA
[2] DEF NUCL AGCY,WASHINGTON,DC
关键词
Activation Energy - Interfacial Radiation Effects - Semiconductor Device Thermal Factors;
D O I
10.1109/23.25438
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1192 / 1196
页数:5
相关论文
共 21 条
[1]  
BARNES C, 1988, IEEE T NUCL SCI, V35
[2]   DEFECTS AND IMPURITIES IN THERMAL OXIDES ON SILICON [J].
BROWER, KL ;
LENAHAN, PM ;
DRESSENDORFER, PV .
APPLIED PHYSICS LETTERS, 1982, 41 (03) :251-253
[3]   HYPERFINE INTERACTIONS OF THE PB CENTER AT THE SIO2 SI(111) INTERFACE [J].
COOK, M ;
WHITE, CT .
PHYSICAL REVIEW LETTERS, 1987, 59 (15) :1741-1744
[4]   THEORY OF THE PB CENTER AT THE [111] SI/SIO2 INTERFACE [J].
EDWARDS, AH .
PHYSICAL REVIEW B, 1987, 36 (18) :9638-9648
[5]  
EDWARDS AH, 1984, IEEE T ELECTRON DEV, V31, P42
[6]   THE EFFECTS OF WATER ON OXIDE AND INTERFACE TRAPPED CHARGE GENERATION IN THERMAL SIO2-FILMS [J].
FEIGL, FJ ;
YOUNG, DR ;
DIMARIA, DJ ;
LAI, S ;
CALISE, J .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (09) :5665-5682
[7]   INTERFACE TRAPS AND PB CENTERS IN OXIDIZED (100) SILICON-WAFERS [J].
GERARDI, GJ ;
POINDEXTER, EH ;
CAPLAN, PJ ;
JOHNSON, NM .
APPLIED PHYSICS LETTERS, 1986, 49 (06) :348-350
[9]  
GRISCOM DL, 1988, P ELECTROCHEM SOC AT
[10]   PROTON AND SODIUM TRANSPORT IN SIO2 FILMS [J].
HOFSTEIN, SR .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1967, ED14 (11) :749-+