DIRECT COMPARISON OF ION-DAMAGE GETTERING AND PHOSPHORUS-DIFFUSION GETTERING OF AU IN SI

被引：128

作者：

SEIDEL, TE ^{[1
]}

MEEK, RL ^{[1
]}

CULLIS, AG ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 02期

关键词：

D O I：

10.1063/1.321664

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：600 / 609

页数：10

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