共 21 条
[1]
BIERSACK JP, 1980, NUCL INSTRUM METHODS, V178, P257
[4]
HYDROGEN-RELATED COMPLEXES AS THE STRESSING SPECIES IN HIGH-FLUENCE, HYDROGEN-IMPLANTED, SINGLE-CRYSTAL SILICON
[J].
PHYSICAL REVIEW B,
1992, 46 (04)
:2061-2070
[5]
HYDROGEN PRECIPITATION IN HIGHLY OVERSATURATED SINGLE-CRYSTALLINE SILICON
[J].
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE,
1995, 150 (02)
:539-586
[9]
KAWAGUCHI T, 1993, JPN J APPL PHYS, V32, P215