VISIBLE PHOTOLUMINESCENCE FROM HE-IMPLANTED SILICON

被引:8
作者
BISERO, D
COMI, F
NOBILI, C
TONINI, R
OTTAVIANI, G
MAZZOLENI, C
PAVESI, L
机构
[1] UNIV MODENA,DIPARTIMENTO FIS,I-41100 MODENA,ITALY
[2] UNIV TRENT,DIPARTIMENTO FIS,I-38050 TRENT,ITALY
[3] INFM,I-38050 TRENT,ITALY
关键词
D O I
10.1063/1.115275
中图分类号
O59 [应用物理学];
学科分类号
摘要
Visible photoluminescence has been observed at cryogenic temperatures from crystalline Si bombarded with He and exposed to H either as plasma or gas in the 250-450 degrees C temperature range. The experimental results are consistent with the formation of Si nanoparticles produced by He segregation, which is responsible for exciton localization, and H passivation of the nonradiative recombination centers. (C) 1995 American Institute of Physics.
引用
收藏
页码:3447 / 3449
页数:3
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