ELECTRON-BEAM TESTING - METHODS AND APPLICATIONS

[11] VOLTAGE CONTRAST LINEARIZATION WITH A HEMISPHERICAL RETARDING ANALYZER [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (11): : 930 - 933

[12] BEAM CHOPPER FOR SUB-NANOSECOND PULSES IN SCANNING ELECTRON-MICROSCOPY [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (06): : 529 - 532

[13] FEUERBAUM HP, 1978, SCANNING ELECTRON MI, V1, P795

[14] FEUERBAUM HP, 1979, SEM, V1, P285

[15] FEUERBAUM HP, 1981, MICROCIRCUIT ENG, P507

[16] FLEMMING JP, 1970, SCANNING ELECTRON MI, P465

[17] FUNCTION TESTING OF BIPOLAR ICS AND LSIS WITH THE STROBOSCOPIC SCANNING ELECTRON-MICROSCOPE [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1980, 15 (02) : 177 - 183

[18] GONZALES AJ, 1975, TECHNICAL DIGEST IED, P119

[19] GONZALES AJ, 1978, J VAC SCI TECHNOL, P837

[20] DEFLECTION BEAM-CHOPPING IN SEM [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1977, 10 (03): : 229 - 236

[11] VOLTAGE CONTRAST LINEARIZATION WITH A HEMISPHERICAL RETARDING ANALYZER [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1974, 7 (11): : 930 - 933

[12] BEAM CHOPPER FOR SUB-NANOSECOND PULSES IN SCANNING ELECTRON-MICROSCOPY [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (06): : 529 - 532

[13] FEUERBAUM HP, 1978, SCANNING ELECTRON MI, V1, P795

[14] FEUERBAUM HP, 1979, SEM, V1, P285

[15] FEUERBAUM HP, 1981, MICROCIRCUIT ENG, P507

[16] FLEMMING JP, 1970, SCANNING ELECTRON MI, P465

[17] FUNCTION TESTING OF BIPOLAR ICS AND LSIS WITH THE STROBOSCOPIC SCANNING ELECTRON-MICROSCOPE [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1980, 15 (02) : 177 - 183

[18] GONZALES AJ, 1975, TECHNICAL DIGEST IED, P119

[19] GONZALES AJ, 1978, J VAC SCI TECHNOL, P837

[20] DEFLECTION BEAM-CHOPPING IN SEM [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1977, 10 (03): : 229 - 236