RADIO-FREQUENCY SPUTTER DEPOSITED BORON-NITRIDE FILMS

被引：65

作者：

WIGGINS, MD

AITA, CR

HICKERNELL, FS

机构：

[1] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201

[2] MOTOROLA INC,GOVT ELECTR GRP,SCOTTSDALE,AZ 85252

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572592

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：322 / 325

页数：4

相关论文

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