DEFECT GENERATION IN SILICON DIOXIDE FROM SOFT-X-RAY SYNCHROTRON RADIATION

被引：33

作者：

WILLIAMS, CK

REISMAN, A

BHATTACHARYA, P

NG, W

机构：

[1] SUNY STONY BROOK,STONY BROOK,NY 11792

[2] N CAROLINA STATE UNIV,DEPT ELECT & COMP ENGN,RALEIGH,NC 27695

[3] BHABHA ATOM RES CTR,BOMBAY 400085,INDIA

来源：

关键词：

D O I：

10.1063/1.341876

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1145 / 1151

页数：7

共 17 条

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[8] THIN-FILM STRUCTURE TO REDUCE RADIATION-DAMAGE IN X-RAY-LITHOGRAPHY
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