INTERACTION OF GOLD, PALLADIUM AND AU-PD ALLOY DEPOSITS WITH OXIDIZED SI(100) SUBSTRATES

被引：13

作者：

ANTON, R

机构：

来源：

THIN SOLID FILMS | 1984年 / 120卷 / 04期

关键词：

D O I：

10.1016/0040-6090(84)90244-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：293 / 311

页数：19

共 30 条

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