OPTICAL-PROPERTIES OF SILICON OXYNITRIDE DIELECTRIC WAVE-GUIDES

被引：33

作者：

BOSSI, DE ^{[1
]}

HAMMER, JM ^{[1
]}

SHAW, JM ^{[1
]}

机构：

[1] RCA LABS, PRINCETON, NJ 08540 USA

来源：

APPLIED OPTICS | 1987年 / 26卷 / 04期

关键词：

D O I：

10.1364/AO.26.000609

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：609 / 611

页数：3

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