CHARACTERIZATION OF ELECTRON TRAPPING DEFECTS ON SILICON BY SCANNING TUNNELING MICROSCOPY

被引:39
作者
KOCH, RH
HAMERS, RJ
机构
关键词
D O I
10.1016/0039-6028(87)90174-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:333 / 339
页数:7
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