LASER WET ETCHING OF DIFFRACTION GRATINGS IN GAAS FOR INTEGRATED-OPTICS

被引：9

作者：

MATZ, R

机构：

来源：

关键词：

D O I：

10.1109/JLT.1986.1074832

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：726 / 729

页数：4

共 16 条

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