THE DETERMINATION OF SPECIES DISTRIBUTION AND DEDUCTION OF MIXING AND EFFECTIVE DIFFUSION PARAMETERS IN THE ALTERED LAYER OF IRRADIATED FILMS

被引：6

作者：

NOBES, MJ ^{[1
]}

CARTER, G ^{[1
]}

KATARDJIEV, IV ^{[1
]}

机构：

[1] BULGARIAN ACAD SCI,INST ELECTR,BU-1784 SOFIA,BULGARIA

来源：

VACUUM | 1991年 / 42卷 / 1-2期

关键词：

D O I：

10.1016/0042-207X(91)90070-Y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Models of intermixing of atomic species during ion bombardment with or without congruent atomic deposition are discussed. These include both discretized and continuum approaches and situations in which approximations allow either solution of first order non-linear differential equations or approximations to solutions of second order non-linear equations. An example of impairment of sputter depth profiling resolution is considered and the effective bombardment induced diffusion variation with depth is evaluated. © 1990.

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收藏

页码：21 / 27

页数：7

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