OXIDATION THROUGH THE ZIRCONIA SUBSTRATES OF HETEROEPITAXIAL SILICON FILMS GROWN ON YTTRIA-STABILIZED CUBIC ZIRCONIA

被引：2

作者：

GOLECKI, I

MADDOX, RL

GLASS, HL

LIN, AL

RAAB, TJ

MANASEVIT, HM

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1985年 / 14卷 / 05期

关键词：

D O I：

10.1007/BF02654023

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：531 / 550

页数：20

共 55 条

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GOLECKI, I ;

MANASEVIT, HM ;

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YANG, JJ ;

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GLASS, HL ;

KINOSHITA, G ;

MAGEE, TJ .

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