RUTHERFORD BACKSCATTERING AND CHANNELING ANALYSIS OF EPITAXIAL, LOW-MASS FILMS ON HIGH-MASS SUBSTRATES

被引：4

作者：

GOLECKI, I ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期

关键词：

D O I：

10.1016/0167-5087(83)90956-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：63 / 66

页数：4

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