GROWTH OF METAL OVERLAYERS ON SEMICONDUCTOR SURFACES - A PROTOTYPE STUDY

被引：6

作者：

BATRA, IP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 02期

关键词：

D O I：

10.1116/1.583134

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：750 / 752

页数：3

共 47 条

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