This work presents millimeter wave performance achieved by ion-implanted InGaAs/GaAs metal semiconductor field-effect transistor devices. A current gain cutoff frequency f(t) of 126 GHz and maximum frequency of oscillation f(max) of 232 GHz have been measured for 0.20-mu-m gate length devices. The f(t) and low-field Hall mobility data, measured at 300 and 112 K, lead us to conclude that the average electron velocity under the gate is mainly due to the high-field velocity rather than low-field electron mobility.