ADHESION OF TITANIUM THIN-FILM TO OXIDE SUBSTRATES

被引：27

作者：

KIM, YH

CHAUG, YS

CHOU, NJ

KIM, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.574259

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2890 / 2893

页数：4

共 21 条

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[9] AN XPS STUDY OF THE INFLUENCE OF ION SPUTTERING ON BONDING IN THERMALLY GROWN SILICON DIOXIDE [J].

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