DEPOSITION TECHNIQUES AND APPLICATIONS OF AMORPHOUS-SILICON FILMS

被引:7
作者
CRAMAROSSA, F
CAPEZZUTO, P
机构
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D O I
10.1016/0254-0584(82)90021-9
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:213 / 233
页数:21
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