ISOLATION OF SILICON FILM GROWN ON POROUS SILICON LAYER

被引：8

作者：

TAKAI, H

ITOH, T

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1983年 / 12卷 / 06期

关键词：

D O I：

10.1007/BF02654968

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：973 / 982

页数：10

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共 7 条

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