THE FORMATION OF TA+ SECONDARY IONS AT OXYGEN-COVERED TA SURFACES

被引：28

作者：

OECHSNER, H

SROUBEK, Z

机构：

[1] TECH UNIV CLAUSTHAL,INST PHYS,D-3392 CLAUSTHAL ZELLERFE,FED REP GER

[2] SONDERFORSCH BEREICH 126,GOTTINGEN,FED REP GER

来源：

关键词：

D O I：

10.1016/0039-6028(83)90396-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：10 / 20

页数：11

共 19 条

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SROUBEK, Z .

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SROUBEK, Z ;

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[17] THEORY OF CHARGE STATES IN SPUTTERING [J].

SROUBEK, Z .

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[18]

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WITTMAACK K, 1980, UNPUB 3RD INT WORKSH