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EPITAXIAL GERMANIUM-SILICON STRUCTURES OBTAINED IN ULTRAHIGH-VACUUM
被引:10
作者
:
ALEKSANDROV, LN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
ALEKSANDROV, LN
[
1
]
LOVYAGIN, RN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
LOVYAGIN, RN
[
1
]
机构
:
[1]
ACAD SCI USSR,SEMICOND PHYS INST,NOVOSIBIRSK,USSR
来源
:
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
|
1976年
/ 37卷
/ 01期
关键词
:
D O I
:
10.1002/pssa.2210370142
中图分类号
:
T [工业技术];
学科分类号
:
08 ;
摘要
:
引用
收藏
页码:341 / 352
页数:12
相关论文
共 18 条
[1]
SURFACE PROCESSES IN GROWTH SILICON ON (111)SILICON IN ULTRAHIGH VACUUM
ABBINK, HC
论文数:
0
引用数:
0
h-index:
0
ABBINK, HC
BROUDY, RM
论文数:
0
引用数:
0
h-index:
0
BROUDY, RM
MCCARTHY, GP
论文数:
0
引用数:
0
h-index:
0
MCCARTHY, GP
[J].
JOURNAL OF APPLIED PHYSICS,
1968,
39
(10)
: 4673
-
&
[2]
EFFECT OF DEPOSITION PARAMETERS ON CRYSTALLINITY OF EVAPORATED GERMANIUM FILMS
ADAMSKY, RF
论文数:
0
引用数:
0
h-index:
0
机构:
NASA Electronics Research Center, Cambridge
ADAMSKY, RF
[J].
JOURNAL OF APPLIED PHYSICS,
1969,
40
(11)
: 4301
-
&
[3]
HETEROEPITAXY OF GERMANIUM THIN-FILMS ON SILICON BY ION SPUTTERING
ALEKSANDROV, LN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ALEKSANDROV, LN
LOVYAGIN, RN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
LOVYAGIN, RN
PCHELYAKOV, OP
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
PCHELYAKOV, OP
STENIN, SI
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
STENIN, SI
[J].
JOURNAL OF CRYSTAL GROWTH,
1974,
24
(OCT)
: 298
-
301
[4]
STEP MOTION OF GROWTH SURFACE IN INITIAL-STAGE OF SEMICONDUCTOR FILM EPITAXY WITH ION SPUTTERING
ALEKSANDROV, LN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ALEKSANDROV, LN
LOVYAGIN, RN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
LOVYAGIN, RN
[J].
THIN SOLID FILMS,
1974,
20
(01)
: 1
-
10
[5]
ALEKSANDROV LN, 1972, MIKROELEKTRONIKA, V1, P120
[6]
ALEKSANDROV LN, 1974, OBZORY PO ELEKTRON T, V2, P193
[7]
P-LAYERS ON VACUUM HEATED SILICON
ALLEN, FG
论文数:
0
引用数:
0
h-index:
0
ALLEN, FG
BUCK, TM
论文数:
0
引用数:
0
h-index:
0
BUCK, TM
LAW, JT
论文数:
0
引用数:
0
h-index:
0
LAW, JT
[J].
JOURNAL OF APPLIED PHYSICS,
1960,
31
(06)
: 979
-
985
[8]
EPITAXIAL GROWTH OF SILICON AND GERMANIUM FILMS ON (111) SILICON SURFACES USING UHV SUBLIMATION AND EVAPORATION TECHNIQUES
CULLIS, AG
论文数:
0
引用数:
0
h-index:
0
CULLIS, AG
BOOKER, GR
论文数:
0
引用数:
0
h-index:
0
BOOKER, GR
[J].
JOURNAL OF CRYSTAL GROWTH,
1971,
9
(01)
: 132
-
&
[9]
INFLUENCE OF SUBSTRATE SURFACE CONDITIONS ON NUCLEATION AND GROWTH OF EPITAXIAL SILICON FILMS
JOYCE, BA
论文数:
0
引用数:
0
h-index:
0
机构:
Alien Clark Research Centre, The Plessey Company Limited, Caswell, Towcester, Northants. England
JOYCE, BA
NEAVE, JH
论文数:
0
引用数:
0
h-index:
0
机构:
Alien Clark Research Centre, The Plessey Company Limited, Caswell, Towcester, Northants. England
NEAVE, JH
WATTS, BE
论文数:
0
引用数:
0
h-index:
0
机构:
Alien Clark Research Centre, The Plessey Company Limited, Caswell, Towcester, Northants. England
WATTS, BE
[J].
SURFACE SCIENCE,
1969,
15
(01)
: 1
-
&
[10]
LOW-TEMPERATURE EPITAXY OF GE FILMS BY SPUTTER DEPOSITION
KHAN, IH
论文数:
0
引用数:
0
h-index:
0
机构:
NASA,AMES RES CTR,MOFFETT FIELD,CA 94035
NASA,AMES RES CTR,MOFFETT FIELD,CA 94035
KHAN, IH
[J].
JOURNAL OF APPLIED PHYSICS,
1973,
44
(01)
: 14
-
19
←
1
2
→
共 18 条
[1]
SURFACE PROCESSES IN GROWTH SILICON ON (111)SILICON IN ULTRAHIGH VACUUM
ABBINK, HC
论文数:
0
引用数:
0
h-index:
0
ABBINK, HC
BROUDY, RM
论文数:
0
引用数:
0
h-index:
0
BROUDY, RM
MCCARTHY, GP
论文数:
0
引用数:
0
h-index:
0
MCCARTHY, GP
[J].
JOURNAL OF APPLIED PHYSICS,
1968,
39
(10)
: 4673
-
&
[2]
EFFECT OF DEPOSITION PARAMETERS ON CRYSTALLINITY OF EVAPORATED GERMANIUM FILMS
ADAMSKY, RF
论文数:
0
引用数:
0
h-index:
0
机构:
NASA Electronics Research Center, Cambridge
ADAMSKY, RF
[J].
JOURNAL OF APPLIED PHYSICS,
1969,
40
(11)
: 4301
-
&
[3]
HETEROEPITAXY OF GERMANIUM THIN-FILMS ON SILICON BY ION SPUTTERING
ALEKSANDROV, LN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ALEKSANDROV, LN
LOVYAGIN, RN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
LOVYAGIN, RN
PCHELYAKOV, OP
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
PCHELYAKOV, OP
STENIN, SI
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
STENIN, SI
[J].
JOURNAL OF CRYSTAL GROWTH,
1974,
24
(OCT)
: 298
-
301
[4]
STEP MOTION OF GROWTH SURFACE IN INITIAL-STAGE OF SEMICONDUCTOR FILM EPITAXY WITH ION SPUTTERING
ALEKSANDROV, LN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ALEKSANDROV, LN
LOVYAGIN, RN
论文数:
0
引用数:
0
h-index:
0
机构:
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
ACAD SCI USSR, SEMICONDUCTOR PHYS INST, NOVOSIBIRSK, USSR
LOVYAGIN, RN
[J].
THIN SOLID FILMS,
1974,
20
(01)
: 1
-
10
[5]
ALEKSANDROV LN, 1972, MIKROELEKTRONIKA, V1, P120
[6]
ALEKSANDROV LN, 1974, OBZORY PO ELEKTRON T, V2, P193
[7]
P-LAYERS ON VACUUM HEATED SILICON
ALLEN, FG
论文数:
0
引用数:
0
h-index:
0
ALLEN, FG
BUCK, TM
论文数:
0
引用数:
0
h-index:
0
BUCK, TM
LAW, JT
论文数:
0
引用数:
0
h-index:
0
LAW, JT
[J].
JOURNAL OF APPLIED PHYSICS,
1960,
31
(06)
: 979
-
985
[8]
EPITAXIAL GROWTH OF SILICON AND GERMANIUM FILMS ON (111) SILICON SURFACES USING UHV SUBLIMATION AND EVAPORATION TECHNIQUES
CULLIS, AG
论文数:
0
引用数:
0
h-index:
0
CULLIS, AG
BOOKER, GR
论文数:
0
引用数:
0
h-index:
0
BOOKER, GR
[J].
JOURNAL OF CRYSTAL GROWTH,
1971,
9
(01)
: 132
-
&
[9]
INFLUENCE OF SUBSTRATE SURFACE CONDITIONS ON NUCLEATION AND GROWTH OF EPITAXIAL SILICON FILMS
JOYCE, BA
论文数:
0
引用数:
0
h-index:
0
机构:
Alien Clark Research Centre, The Plessey Company Limited, Caswell, Towcester, Northants. England
JOYCE, BA
NEAVE, JH
论文数:
0
引用数:
0
h-index:
0
机构:
Alien Clark Research Centre, The Plessey Company Limited, Caswell, Towcester, Northants. England
NEAVE, JH
WATTS, BE
论文数:
0
引用数:
0
h-index:
0
机构:
Alien Clark Research Centre, The Plessey Company Limited, Caswell, Towcester, Northants. England
WATTS, BE
[J].
SURFACE SCIENCE,
1969,
15
(01)
: 1
-
&
[10]
LOW-TEMPERATURE EPITAXY OF GE FILMS BY SPUTTER DEPOSITION
KHAN, IH
论文数:
0
引用数:
0
h-index:
0
机构:
NASA,AMES RES CTR,MOFFETT FIELD,CA 94035
NASA,AMES RES CTR,MOFFETT FIELD,CA 94035
KHAN, IH
[J].
JOURNAL OF APPLIED PHYSICS,
1973,
44
(01)
: 14
-
19
←
1
2
→