CHARACTERIZATION OF THIN ACTIVE LAYER ON SEMI-INSULATING GAAS BY MAPPING OF FET ARRAY PERFORMANCE

被引:13
作者
ISHII, Y
MIYAZAWA, S
ISHIDA, S
机构
关键词
D O I
10.1109/T-ED.1984.21659
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1051 / 1056
页数:6
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