NEW AUTOMATIC ELLIPSOMETER

被引：2

作者：

LLUESMA, EG ^{[1
]}

PELA, CA ^{[1
]}

WILMANNS, I ^{[1
]}

机构：

[1] UNIV ESTADUAL CAMPINAS,INST FISICA GLEB WATAGHIN,CAMPINAS,SAO PAULO,BRAZIL

来源：

关键词：

D O I：

10.1016/0039-6028(76)90446-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：189 / 195

页数：7

共 11 条

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[6] Sissingh R, 1926, PHYS Z, V27, P518
[7] SPARNAAY MJ, 1974, VAKUUM-TECH, V23, P141
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[J]. SURFACE SCIENCE, 1969, 16 : 147 - &
[9] WILMANNS I, 1974, JAPAN J APPL PHYS S, V2, P693
[10] NEW TYPE OF PRECISION ELLIPSOMETER WITHOUT EMPLOYING A COMPENSATOR
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