共 19 条
- [11] LEE YK, 1980, AM CHEM SOC DIV ORG, V43, P461
- [12] CHARACTERISTICS OF RESIST FILMS PRODUCED BY SPINNING [J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (07) : 3993 - 3997
- [13] PROPERTIES OF THIN POLYIMIDE FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (10) : 2216 - 2220
- [14] NEW TRANSISTOR WITH 2-LEVEL METAL-ELECTRODES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (10) : 1619 - 1622
- [15] SROOG CE, 1976, MACROMOL REV, V11, P161
- [18] POLYIMIDE INSULATORS FOR MULTILEVEL INTERCONNECTIONS [J]. THIN SOLID FILMS, 1981, 83 (02) : 145 - 163
- [19] PRELIMINARY PROCESSI