PROPERTIES OF HYDROGENATED AMORPHOUS SI-N PREPARED BY VARIOUS METHODS

被引：104

作者：

MORIMOTO, A

TSUJIMURA, Y

KUMEDA, M

SHIMIZU, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期

关键词：

D O I：

10.1143/JJAP.24.1394

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1394 / 1398

页数：5

共 15 条

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