PREPARATION PHYSICAL STRUCTURE RELATIONS IN SIC SPUTTERED FILMS

被引：41

作者：

ROY, RA

MESSIER, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.572590

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

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页码：312 / 315

页数：4

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