ELECTRON-MICROSCOPY OF SILICON MONOPHOSPHIDE PRECIPITATES IN P-DIFFUSED SILICON

被引：32

作者：

SERVIDORI, M ^{[1
]}

ARMIGLIATO, A ^{[1
]}

机构：

[1] CNR,LAB LAMEL,VIA CASTAGNOLI 1,BOLOGNA,ITALY

来源：

关键词：

D O I：

10.1007/BF00540355

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：306 / 313

页数：8

共 10 条

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