THERMIONIC EMISSION MODEL FOR THE INITIAL REGIME OF SILICON OXIDATION

被引：42

作者：

IRENE, EA

LEWIS, EA

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 10期

关键词：

D O I：

10.1063/1.98861

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：767 / 769

页数：3

共 35 条

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