ELECTRON-MICROSCOPE OBSERVATION OF AU/SI (111) INTERFACE IN ATOMIC LEVEL

Au/Si (111) interfaces were investigated by a high resolution electron microscope in both 'cross-sectional' and 'flat-on' modes. The epitaxially grown Au (111) films of 10-20 nm thick on Si (111) show a mosaic structure of about 100 nm in diameter making small angle grain boundaries. By the flat-on observation, a fringe contrast of 0. 28 nm spacing are observed in the boundary. The cross-sectional observations reveal that the interface is flat and the intermixing layers are formed along the surface in Si side. A long periodicity contrast anomaly was often observed in the intermixing layer images.