X-RAY-DIFFRACTION ANALYSIS OF SUPERLATTICES GROWN ON MISORIENTED SUBSTRATES

被引:9
作者
RAVILA, P
AIRAKSINEN, VM
LIPSANEN, H
TUOMI, T
CLAXTON, PA
机构
[1] HELSINKI UNIV TECHNOL,ELECTRON PHYS LAB,SF-02150 ESPOO 15,FINLAND
[2] UNIV SHEFFIELD,DEPT ELECTR & ELECT ENGN,SHEFFIELD S1 3JD,S YORKSHIRE,ENGLAND
关键词
D O I
10.1016/0022-0248(91)90402-Q
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
X-ray diffraction curves are measured at a number of azimuth angles to determine the period of an InxGa1-xAs/InP superlattice grown on a misoriented InP substrate. It is shown that a substrate misorientation of 2.2-degrees can cause an error as large as 7% to the calculated value of the superlattice period if the measurement is made at an arbitrary azimuth angle.
引用
收藏
页码:569 / 572
页数:4
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