METASTABLE PHASE FORMATION IN REACTIVELY SPUTTERED WXSIY FILMS

被引：1

作者：

LIN, JS

BUDHANI, RC

POLLOCK, G

DESHPANDEY, CV

BUNSHAH, RF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573639

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3117 / 3120

页数：4

共 11 条

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