HYDROGEN INDUCED CHANGES IN THE METALLURGICAL INTERACTIONS AT PTSI-SI INTERFACES

被引：1

作者：

BARDIN, TT ^{[1
]}

PRONKO, JG ^{[1
]}

BUDHANI, RC ^{[1
]}

BUNSHAH, RF ^{[1
]}

机构：

[1] UNIV CALIF LOS ANGELES,DEPT MAT SCI & ENGN,LOS ANGELES,CA 90024

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573640

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3121 / 3126

页数：6

共 12 条

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[8] INTERFACIAL REACTION AND SCHOTTKY-BARRIER IN METAL-SILICON SYSTEMS [J].

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[9] ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS HYDROGENATED SILICON PREPARED BY REACTIVE ION-BEAM SPUTTERING [J].

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