THEORETICAL-STUDY OF THE ULTIMATE RESOLUTION IN ELECTRON-BEAM LITHOGRAPHY BY MONTE-CARLO SIMULATION, INCLUDING SECONDARY-ELECTRON GENERATION - ENERGY-DISSIPATION PROFILE IN POLYMETHYLMETHACRYLATE

被引：38

作者：

SAMOTO, N

SHIMIZU, R

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 07期

关键词：

D O I：

10.1063/1.332610

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3855 / 3859

页数：5

共 18 条

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