SIMS STUDIES OF BE-9 IMPLANTS IN SEMI-INSULATING INP

被引：26

作者：

OBERSTAR, JD

STREETMAN, BG

BAKER, JE

WILLIAMS, P

机构：

[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 06期

关键词：

D O I：

10.1149/1.2124127

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1312 / 1320

页数：9

共 59 条

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