LASER-ASSISTED DEPOSITION OF THIN-FILMS FROM GAS-PHASE AND SURFACE-ADSORBED MOLECULES

被引：181

作者：

HERMAN, IP

机构：

来源：

CHEMICAL REVIEWS | 1989年 / 89卷 / 06期

关键词：

D O I：

10.1021/cr00096a005

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

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页码：1323 / 1357

页数：35

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[90] LASER-INDUCED SELECTIVE COPPER DEPOSITION ON POLYIMIDE
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