LASER-ASSISTED DEPOSITION OF THIN-FILMS FROM GAS-PHASE AND SURFACE-ADSORBED MOLECULES

被引:181
作者
HERMAN, IP
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D O I
10.1021/cr00096a005
中图分类号
O6 [化学];
学科分类号
0703 ;
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页码:1323 / 1357
页数:35
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