ROOM-TEMPERATURE ANODIC PLASMA OXIDATION OF TANTALUM SILICIDE - OXIDE COMPOSITION AND ELECTRICAL-PROPERTIES

被引：3

作者：

CLIMENT, A

PERRIERE, J

LAURENT, A

LAVERNHE, B

PEREZCASERO, R

MARTINEZDUART, JM

机构：

[1] UNIV AUTONOMA MADRID, CSIC, INST CIENCIA MAT B, E-28049 MADRID, SPAIN

[2] UNIV PARIS 07, PHYS SOLIDES GRP, F-75251 PARIS 05, FRANCE

来源：

APPLIED SURFACE SCIENCE | 1989年 / 38卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(89)90527-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：125 / 132

页数：8

共 17 条

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