PERFORMANCE CAPABILITIES OF REFLECTOMETERS AND ELLIPSOMETERS FOR COMPOSITIONAL ANALYSIS DURING ALXGA1-XAS EPITAXY

被引：7

作者：

GILMORE, W ^{[1
]}

ASPNES, DE ^{[1
]}

机构：

[1] N CAROLINA AGR & TECH STATE UNIV,DEPT ELECT ENGN,GREENSBORO,NC 27411

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 13期

关键词：

D O I：

10.1063/1.113870

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Performance capabilities of reflectometers and ellipsometers for determining near-surface dielectric properties by virtual-interface analysis of kinetic data are calculated for the prototypical semiconductor alloy Al0.30Ga0.70As. Measurement of phase as well as amplitude improves relative sensitivities by over an order of magnitude.© 1995 American Institute of Physics.

引用

页码：1617 / 1619

页数：3

共 23 条

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