EXPERIMENTAL CHARACTERIZATION OF ELECTRICAL-CONDUCTION IN UNDOPED POLYCRYSTALLINE SILICON THIN-FILMS

被引：1

作者：

KIM, DM

QIAN, F

AHMED, SS

PARK, HK

SACHITANO, JL

机构：

[1] TEKTRONIX INC, APPL RES LAB, BEAVERTON, OR 97077 USA

[2] INTEL CORP INC, TECHNOL & DEV LAB, ALOHA, OR 97007 USA

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1987年 / 26卷 / 06期

关键词：

D O I：

10.1143/JJAP.26.863

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：863 / 867

页数：5

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