STATIC TECHNIQUE FOR PRECISE MEASUREMENTS OF SURFACE-POTENTIAL AND INTERFACE STATE DENSITY IN MOS STRUCTURES

被引:62
作者
ZIEGLER, K [1 ]
KLAUSMANN, E [1 ]
机构
[1] FRAUNHOFER GESELL, INST ANGEW FESTKOERPER PHYS, ECKER STR 4, 78 FREIBURG, FED REP GER
关键词
D O I
10.1063/1.88193
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:400 / 402
页数:3
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