SURFACE-REACTIONS OF SILANE WITH OXIDIZED INP AND THEIR APPLICATION TO THE IMPROVEMENT OF CHEMICAL VAPOR-DEPOSITION GROWN, INP-BASED METAL-INSULATOR-SEMICONDUCTOR DEVICES

被引：15

作者：

LICOPPE, C ^{[1
]}

MOISON, JM ^{[1
]}

NISSIM, YI ^{[1
]}

REGOLINI, JL ^{[1
]}

BENSAHEL, D ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN,F-38243 MEYLAN,FRANCE

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 14期

关键词：

D O I：

10.1063/1.100426

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1291 / 1293

页数：3

共 14 条

[1] A STUDY OF CHEMICAL BONDING IN SUBOXIDES OF SILICON USING AUGER-ELECTRON SPECTROSCOPY [J].

CHAO, SS ;

TYLER, JE ;

TAKAGI, Y ;

PAI, PG ;

LUCOVSKY, G ;

LIN, SY ;

WONG, CK ;

MANTINI, MJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1574-1579

[2] ARSENIC PASSIVATION OF INP SURFACE FOR METAL-INSULATOR-SEMICONDUCTOR DEVICES BASED ON BOTH ULTRAHIGH-VACUUM TECHNIQUE AND CHEMICAL PROCEDURE [J].

CHAVE, J ;

CHOUJAA, A ;

SANTINELLI, C ;

BLANCHET, R ;

VIKTOROVITCH, P .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (01) :257-260

[3] ON THE NATURE OF OXIDES ON INP-SURFACES [J].

HOLLINGER, G ;

BERGIGNAT, E ;

JOSEPH, J ;

ROBACH, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2082-2088

[4]

HOLLINGER G, 1979, THESIS U LYON

[5]

KIRK DL, 1980, J PHYS D, V14, P451

[6] THE INFLUENCE OF OXIDATION AND ANNEALING ON INP NATIVE CHEMICAL OXIDES [J].

KOROTCHENKOV, GS ;

MIKHAILOV, VA ;

TSVITSINSKY, VI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (04) :981-984

[7] THE EFFECT OF INTERFACIAL TRAPS ON THE STABILITY OF INSULATED GATE DEVICES ON INP [J].

LILE, DL ;

TAYLOR, MJ .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (01) :260-267

[8] COMPOSITION AND STRUCTURE OF THERMAL OXIDES OF INDIUM-PHOSPHIDE [J].

NELSON, A ;

GEIB, K ;

WILMSEN, CW .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (07) :4134-4140

[9]

NISSIM YI, 1987, EMRS M, V15, P213

[10] ANALYSIS OF NATIVE OXIDE-FILMS AND OXIDE SUBSTRATE REACTIONS ON III-V-SEMICONDUCTORS USING THERMOCHEMICAL PHASE-DIAGRAMS [J].

SCHWARTZ, GP .

THIN SOLID FILMS, 1983, 103 (1-2) :3-16

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