ARSENIC PASSIVATION OF INP SURFACE FOR METAL-INSULATOR-SEMICONDUCTOR DEVICES BASED ON BOTH ULTRAHIGH-VACUUM TECHNIQUE AND CHEMICAL PROCEDURE

被引：21

作者：

CHAVE, J

CHOUJAA, A

SANTINELLI, C

BLANCHET, R

VIKTOROVITCH, P

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 01期

关键词：

D O I：

10.1063/1.338867

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：257 / 260

页数：4

共 21 条

[1]

BAILLY B, 1985, 8502 EC CENTR LYON R

[2] REDUCTION OF FAST INTERFACE STATES AND SUPPRESSION OF DRIFT PHENOMENA IN ARSENIC-STABILIZED METAL-INSULATOR-INP STRUCTURES [J].

BLANCHET, R ;

VIKTOROVITCH, P ;

CHAVE, J ;

SANTINELLI, C .

APPLIED PHYSICS LETTERS, 1985, 46 (08) :761-763

[3] IMPROVED METHOD FOR VACUUM DEPOSITION OF INSULATING FILMS [J].

BLANCHET, RC ;

SANTINELLI, CA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (04) :1948-1949

[4]

Chave J., 1986, Insulating Films on Semiconductors. Proceedings of the International Conference INFOS 85, P89

[5] MOLECULAR-BEAM EPITAXIAL-GROWTH OF UNIFORM IN0.53GA0.47AS ON INP WITH A COAXIAL IN-GA OVEN [J].

CHENG, KY ;

CHO, AY ;

WAGNER, WR ;

BONNER, WA .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (02) :1015-1021

[6]

CHOUJAA A, 1986, Patent No. 4647

[7] ARSENIC STABILIZATION OF INP SUBSTRATES FOR GROWTH OF GAXIN1-XAS LAYERS BY MOLECULAR-BEAM EPITAXY [J].

DAVIES, GJ ;

HECKINGBOTTOM, R ;

OHNO, H ;

WOOD, CEC ;

CALAWA, AR .

APPLIED PHYSICS LETTERS, 1980, 37 (03) :290-292

[8] CHEMICAL VAPOR-DEPOSITION OF PHOSPHORUS NITRIDE AND RELATED-COMPOUNDS [J].

FURUKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (08) :1157-1158

[9] INTERFACIAL PROPERTIES OF AL2O3-INP METAL-INSULATOR-SEMICONDUCTOR STRUCTURE PREPARED IN EXCESS ORGANO-PHOSPHORUS ATMOSPHERE [J].

KOBAYASHI, T ;

ICHIKAWA, T ;

SAKUTA, K ;

FUJISAWA, K .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) :3876-3878

[10] INTERFACIAL CONSTRAINTS ON DEVICE PERFORMANCE [J].

LILE, DL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (03) :496-503

← 1 2 3 →