OXYGEN AND TITANIUM SPUTTERING YIELDS AS DETERMINED BY LASER FLUORESCENCE AND AUGER-ELECTRON SPECTROSCOPY FOR MONOLAYER OXYGEN COVERAGE OF POLYCRYSTALLINE-TI

被引：23

作者：

PELLIN, MJ

YOUNG, CE

MENDELSOHN, MH

GRUEN, DM

WRIGHT, RB

DEWALD, AB

机构：

来源：

JOURNAL OF NUCLEAR MATERIALS | 1982年 / 111卷 / NOV-期

关键词：

D O I：

10.1016/0022-3115(82)90298-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：738 / 743

页数：6

共 25 条

[1] DEPENDENCE OF LIGHT-ION SPUTTERING YIELDS OF IRON ON ION FLUENCE AND OXYGEN PARTIAL-PRESSURE [J].

BEHRISCH, R ;

ROTH, J ;

BOHDANSKY, J ;

MARTINELLI, AP ;

SCHWEER, B ;

RUSBULDT, D ;

HINTZ, E .

JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) :645-655

[2]

DARIS LE, HDB AUGER ELECTRON S

[3]

Dullni, COMMUNICATION

[4] INTERACTION OF OXYGEN AND NITROGEN WITH CLEAN TRANSITION-METAL SURFACES [J].

FROMM, E ;

MAYER, O .

SURFACE SCIENCE, 1978, 74 (01) :259-275

[5] MONTE-CARLO CALCULATIONS OF LIGHT-ION SPUTTERING AS A FUNCTION OF THE INCIDENT ANGLE [J].

HAGGMARK, LG ;

BIERSACK, JP .

JOURNAL OF NUCLEAR MATERIALS, 1980, 93-4 (OCT) :664-669

[6] SPUTTER-EROSION AND IMPURITY EMISSION FROM TITANIUM AND VANADIUM AT LOW-ENERGY ION-BOMBARDMENT [J].

HOFER, WO ;

BAY, HL ;

MARTIN, PJ .

JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) :156-162

[7] INFLUENCE OF REACTIVE GASES ON SPUTTERING AND SECONDARY ION EMISSION - OXIDATION OF TITANIUM AND VANADIUM DURING ENERGETIC PARTICLE IRRADIATION [J].

HOFER, WO ;

MARTIN, PJ .

APPLIED PHYSICS, 1978, 16 (03) :271-278

[8] SPUTTERING OF METALS IN PRESENCE OF REACTIVE GASES [J].

HRBEK, J .

THIN SOLID FILMS, 1977, 42 (02) :185-191

[9] SURFACE-STATES AND OXYGEN-CHEMISORPTION ON TI(0001) [J].

JONKER, BT ;

MORAR, JF ;

PARK, RI .

PHYSICAL REVIEW B, 1981, 24 (06) :2951-2957

[10]

JOSHI A, 1975, METHODS SURFACE ANAL, P164

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