REVIEW OF ETCHING AND DEFECT CHARACTERIZATION OF GALLIUM-ARSENIDE SUBSTRATE MATERIAL

被引：100

作者：

STIRLAND, DJ

STRAUGHAN, BW

机构：

[1] PLESSEY CO LTD, ALLEN CLARK RES CTR, TOWCESTER, NORTHAMPTONSHIR, ENGLAND

[2] ROY RADAR ESTAB, GREAT MALVERN WR14 3PS, WORCESTERSHIRE, ENGLAND

来源：

THIN SOLID FILMS | 1976年 / 31卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(76)90358-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：139 / 170

页数：32

相关论文

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