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REVIEW OF ETCHING AND DEFECT CHARACTERIZATION OF GALLIUM-ARSENIDE SUBSTRATE MATERIAL

被引：100
作者：
STIRLAND, DJ
STRAUGHAN, BW
机构：
[1] PLESSEY CO LTD, ALLEN CLARK RES CTR, TOWCESTER, NORTHAMPTONSHIR, ENGLAND
[2] ROY RADAR ESTAB, GREAT MALVERN WR14 3PS, WORCESTERSHIRE, ENGLAND
来源：
THIN SOLID FILMS | 1976年 / 31卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(76)90358-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：139 / 170
页数：32
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