SCANNING TUNNELING MICROSCOPE TIP-INDUCED ANODIZATION FOR NANOFABRICATION OF TITANIUM

被引：121

作者：

SUGIMURA, H ^{[1
]}

UCHIDA, T ^{[1
]}

KITAMURA, N ^{[1
]}

MASUHARA, H ^{[1
]}

机构：

[1] RES DEV CORP JAPAN,ERATO,MICROPHOTOCONVERS PROJECT,SAKYO KU,KYOTO 606,JAPAN

来源：

JOURNAL OF PHYSICAL CHEMISTRY | 1994年 / 98卷 / 16期

关键词：

D O I：

10.1021/j100067a023

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The fabrication of oxide patterns on titanium (Ti), with a spatial resolution of 20 nm, was accomplished by the use of a scanning tunneling microscope (STM) through applying a positive sample bias (V-s) voltage of +3.0 to +8.0 V in the presence of adsorbed water on Ti. The fabricated patterns were observed as swelled structures in the STM images acquired at V-s = -3.0 V. Surface swelling was induced only when V-s was set positively, and the height of the oxide layer increased with increasing V-s, which suggested that the pattern formation was attributed to electrochemical oxidation of Ti; anodization of Ti with adsorbed water. The role of the faradaic current flows during STM tip-induced anodization for tip control is also discussed in terms of a scanning electrochemical microscope.

引用

页码：4352 / 4357

页数：6

共 21 条

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