HIGHLY DOPED GAAS-SI BY MOLECULAR-BEAM EPITAXY

被引:19
作者
SACKS, R
SHEN, H
机构
[1] CUNY BROOKLYN COLL,BROOKLYN,NY 11210
[2] CUNY,GRAD SCH,DEPT PHYS,NEW YORK,NY 10036
[3] EATON CORP,AIL DIV,MELVILLE,NY 11747
[4] CUNY CTR,NEW YORK,NY 10036
关键词
D O I
10.1063/1.96170
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:374 / 376
页数:3
相关论文
共 13 条
[1]   RAMAN-SPECTROSCOPY - VERSATILE TOOL FOR CHARACTERIZATION OF THIN-FILMS AND HETEROSTRUCTURES OF GAAS AND ALXGA1-XAS [J].
ABSTREITER, G ;
BAUSER, E ;
FISCHER, A ;
PLOOG, K .
APPLIED PHYSICS, 1978, 16 (04) :345-352
[2]   ELECTRON EFFECTIVE MASSES OF INAS AND GAAS AS A FUNCTION OF TEMPERATURE AND DOPING [J].
CARDONA, M .
PHYSICAL REVIEW, 1961, 121 (03) :752-&
[3]   THE EFFECT OF GROWTH-CONDITIONS ON SI INCORPORATION IN MOLECULAR-BEAM EPITAXIAL GAAS [J].
CHAI, YG ;
WOOD, CEC ;
CHOW, R .
APPLIED PHYSICS LETTERS, 1981, 39 (10) :800-803
[4]   COMPENSATION IN N-TYPE GAAS RESULTING FROM NITROGEN ION-IMPLANTATION [J].
DUNCAN, WM ;
MATTESON, S .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (04) :1059-1062
[5]   HEAVY DOPING OF GAAS AND ALGAAS WITH SILICON BY MOLECULAR-BEAM EPITAXY [J].
HEIBLUM, M ;
WANG, WI ;
OSTERLING, LE ;
DELINE, V .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) :6751-6753
[6]   SI AND SN DOPING IN ALXGA1-XAS GROWN BY MBE [J].
ISHIBASHI, T ;
TARUCHA, S ;
OKAMOTO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (08) :L476-L478
[7]  
OKIMOTO K, 1983, APPL PHYS LETT, V43, P1062
[8]   FREE CARRIER REDUCTION IN VACUUM-ANNEALED S-DOPED, SN-DOPED, AND GE-DOPED (100) INP [J].
SCHWARTZ, GP ;
GUALTIERI, GJ ;
DUBOIS, LH ;
BONNER, WA ;
BALLMAN, AA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (07) :1716-1720
[9]  
SHEN H, 1985, SOC PHOTOOPT INSTRUM, V524
[10]  
SZE SM, 1981, PHYSICS SEMICONDUCTO